JPS6452053U - - Google Patents
Info
- Publication number
- JPS6452053U JPS6452053U JP14576987U JP14576987U JPS6452053U JP S6452053 U JPS6452053 U JP S6452053U JP 14576987 U JP14576987 U JP 14576987U JP 14576987 U JP14576987 U JP 14576987U JP S6452053 U JPS6452053 U JP S6452053U
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- control switch
- signal detection
- detection pen
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14576987U JPS6452053U (en]) | 1987-09-24 | 1987-09-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14576987U JPS6452053U (en]) | 1987-09-24 | 1987-09-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6452053U true JPS6452053U (en]) | 1989-03-30 |
Family
ID=31414650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14576987U Pending JPS6452053U (en]) | 1987-09-24 | 1987-09-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6452053U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0440333U (en]) * | 1990-08-03 | 1992-04-06 |
-
1987
- 1987-09-24 JP JP14576987U patent/JPS6452053U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0440333U (en]) * | 1990-08-03 | 1992-04-06 |
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